Y Poplavko, I Golubeva, and Y Prokopenko National Technical University of Ukraine 37, Peremogi Ave, Kiev, 03056, Ukraine e-mail: poplavko@ieeeorg Abstract – Possible alternative of low loss and highly tunable MEMS phase shifter is discussed Dielectric or metallic parts of device should have the piezo-dirigible air gap between them Important is to provide a strong […]